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Electrical Characterization of Sol-Gel Derived PZT Films

Published online by Cambridge University Press:  25 February 2011

G. Teowee ,
J.M. Boulton ,
S.C. Lee  and
D.R. Uhlmann
G. Teowee
Affiliation:
Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
J.M. Boulton
Affiliation:
Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
S.C. Lee
Affiliation:
Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
D.R. Uhlmann
Affiliation:
Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721
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Abstract

Sol-gel derived PZT films were successfully prepared from precursor solutions based on lead acetate and Zr/Ti alkoxides. A pyrochlore phase was observed in films fired at low temperatures, while single-phase perovskite films were obtained at temperatures above 725C. The dielectric constant increased to above 1000 when there was a higher proportion of perovskite than pyrochlore. The films were essentially fatigue-free up to 108 cycles and exhibited a low aging rate of 5.7% / decade-sec.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 255
Copyright
Copyright © Materials Research Society 1992

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