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Electrical and Optical Properties of Low Dielectric Constant Planarization Polymer for High-Aperture-Ratio a-Si:H TFT-LCDs

Published online by Cambridge University Press:  10 February 2011

Je-Hsiung Lan ,
Tsung-Kuan Chou ,
Chun-Sung Chiang  and
Jerzy Kanicki
Je-Hsiung Lan
Affiliation:
Department of Electrical Engineering and Computer Science, Center for Display Technology and Manufacturing, The University of Michigan, Ann Arbor, MI 48109–2108
Tsung-Kuan Chou
Affiliation:
Department of Electrical Engineering and Computer Science, Center for Display Technology and Manufacturing, The University of Michigan, Ann Arbor, MI 48109–2108
Chun-Sung Chiang
Affiliation:
Department of Electrical Engineering and Computer Science, Center for Display Technology and Manufacturing, The University of Michigan, Ann Arbor, MI 48109–2108
Jerzy Kanicki
Affiliation:
Department of Electrical Engineering and Computer Science, Center for Display Technology and Manufacturing, The University of Michigan, Ann Arbor, MI 48109–2108
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Abstract

We have evaluated the electrical and the optical properties of a planarization polymer (benzocyclobutene; BCB) having a dielectric constant of 2.65 for the application to high aperture-ratio a-Si:H TFT-LCDs. An average optical transmittance of 96 % was found for the BCB film having a thickness of 3 μm in the visible-light region (400–700 nm) of the absorption spectrum. Experimental results showed that the back-channel etched a-Si:H TFT electrical performance was not significantly affected by the BCB passivation. In addition, the three-dimensional analysis of the coupling capacitances between ITO pixel electrode and metal bus lines have indicated that the low dielectric constant of planarization polymer is necessary for the application of this material to the high-aperture-ratio a-Si:H TFT-LCDs. Finally, we have established that for a given tolerance margin, a certain value of polymer thickness is needed to suppress the feed-through voltage and the vertical cross-talk between pixel electrode and metal bus lines.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 471: Symposium G – Flat Panel Display Materials III , 1997 , 27
Copyright
Copyright © Materials Research Society 1997

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References

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