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Elastic Properties of Diamond Like Carbon Thin Films: a Brillouin Scattering Study

Published online by Cambridge University Press:  15 February 2011

O. R. Monteiro ,
I. G. Brown ,
R. Sooryakumar  and
M. Chirita
O. R. Monteiro
Affiliation:
Lawrence Berkeley National Laboratory, University of California, Berkeley CA 94720, USA
I. G. Brown
Affiliation:
Lawrence Berkeley National Laboratory, University of California, Berkeley CA 94720, USA
R. Sooryakumar
Affiliation:
Dept. Physics, Ohio State University, Columbus OH 43210, USA
M. Chirita
Affiliation:
Dept. Physics, Ohio State University, Columbus OH 43210, USA
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Abstract

Diamondlike carbon (DLC) thin films have been widely used as hard coatings in a variety of applications where increased wear resistance and hardness are required. Vacuum arc DLC films are among the hardest, with measured hardness values of up to 68 GPa. In our deposition process a repetitively pulsed bias voltage is applied to the substrate, which controls the energy of the incoming C ions. DLC chemical and mechanical properties are strongly affected by the energy of the depositing ions. In this paper, we relate the mechanical properties of these films to the deposition parameters, and describe our initial Brillouin scattering measurements of the elastic constants of monolithic DLC films. Evidence for bulk longitudinal and surface Rayleigh excitation in films with thickness of 50 and 500 nm has been observed. Since the DLC films are amorphous, they are modeled as isotropic solids and the elastic constants CII and C44 are derived.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 444: Symposium I – Materials for Mechanical and Optical Microsystems , 1996 , 93
Copyright
Copyright © Materials Research Society 1997

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References

1. Pharr, G. M., Callahan, D. L., McAdams, S. D., Tsui, T. Y., Anders, S., Anders, A., IIIAger, J. W., Brown, I. G., Bhatia, S., Silva, S. R. P. and Robertson, J., Appl. Phys. Lett. 68, 779 (1996).Google Scholar
2. Voevodin, A. A., Donley, M. S., Zabinski, J. S., Bultman, J. E., Surface and Coatings Technol. 77–78, 534 (1995).Google Scholar
3. Falabella, S., Boercker, D. B., Sanders, D. M., Thin Solid Films 236, 82 (1993).Google Scholar
4. Schwan, J., Ulrich, S., Roth, H., Ehrhardt, H., Silva, S. R. P., Robertson, J., Samlenski, R. and Brenn, R., J. Appl. Phys. 79, 1416 (1996).Google Scholar
5. IIIAger, J. W., Anders, S., Anders, A. and Brown, I. G., Appl. Phys. Lett. 66, 3444 (1995).Google Scholar
6. Sandercock, J. R., “Light Scattering in Solids III”, Ed. Cardona, M., Topics in Applied Physics, Vol.51, Springer-Verlag, New York 1982.Google Scholar
7. Auld, B. A., “Acoustic Fields and Waves in Solids” vol.2 (Wiley, New York 1973).Google Scholar
8. Biersack, J. P., Nucl. Instr. Methods B 27, 21 (1987).Google Scholar
9. Grunewald, W. and Ullmann, J., Phys. Stat. Sol. (a) 122, K129 (1990).Google Scholar
10. Grimsditch, M. and Ramdas, A., Phys. Rev. B 11, 3139 (1975).Google Scholar
11. Grimsditch, M. and Ramdas, A., Phys. Lett.. A 48, 37 (1974).Google Scholar