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Effectiveness of an Inwardly Fired Burner on Abatement of PFCs

Published online by Cambridge University Press:  10 February 2011

A.M. Pierce  and
J. Van Gompel
A.M. Pierce
Affiliation:
Edwards High Vacuum International, 550 Sycamore Drive, Milpitas, CA 95035
J. Van Gompel
Affiliation:
Edwards High Vacuum International, 3100 Alvin DeVane Boulevard, Suite A120, Austin, TX 78741, joe.vangompel@edwards.boc.com
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Abstract

A successful method for abating PFC (perfluorinated compounds) emissions from semiconductor manufacture is presented. The method involves use of a novel thermal technique combining an inwardly fired burner with a built-in wet scrubber for removal of combustion products. The Edwards High Vacuum Thermal Processor Unit (TPU) is a Point of Use abatement device designed to destroy PFC and process gases.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 447: Symposium L – Environmental, Safety, and Health Issues in IC Pro…… , 1996 , 49
Copyright
Copyright © Materials Research Society 1997

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References

1 Ceramic matrix technology is supplied by Alzeta Corporation, Santa Clara, CA.Google Scholar