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The Effect of Hydrogen on the Structure of Amorphous and Microcrystalline Sic Prepared by the Polymer Route

Published online by Cambridge University Press:  21 February 2011

C-J Chu ,
S-J. Ting ,
F. Bobonneau  and
J.D. Mackenzie
C-J Chu
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA 90024
S-J. Ting
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA 90024
F. Bobonneau
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA 90024
J.D. Mackenzie
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA 90024
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Abstract

Amorphous SiC:H thin films have been deposited on different substrates using metal-organic polymer solutions. The structure of the amorphous phase has been proposed as the rings of Si and C atoms with various sizes. Microcrystalline phase can be produced when fired at temperatures higher than 1000°C. 13C MAS-NMR shows the evidence of the C=C-double bonds. ESR results show the major defects in this material are C-dangling bonds. As predict, defects can be decreased by heat treatment in H2 atmosphere.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 164: Symposium H – Materials Issues in Microcrystalline Semiconductors , 1989 , 303
Copyright
Copyright © Materials Research Society 1990

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