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Dynamics of Thin Film NiTi Cantilevers on Si

Published online by Cambridge University Press:  21 February 2011

A.Peter Jardine  and
Peter G. Mercado
A.Peter Jardine
Affiliation:
Dept. of Materials Science and Engineering S.U.N.Y. at Stony Brook Stony Brook, NY 11794-2275
Peter G. Mercado
Affiliation:
Dept. of Materials Science and Engineering S.U.N.Y. at Stony Brook Stony Brook, NY 11794-2275
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Abstract

Although the thermo-mechanical properties of NiTi are well known for bulk material, its deposition and utilization as a thin film are still in their earliest stages of research. The deposition of thin-films of Shape Memory Effect NiTi onto Si(100) wafers offers several advantages over bulk NiTi, including fast response times and comparatively large transformation forces. This has made it a promising candidate material as micro-actuators for Micro-Electro-Mechanical (MEMS) systems as well as for strain measurements. The cycling time for actuation was measured for a 20 μm free standing NiTi thin film cantilever. It was demonstrated that cycling frequencies of up to 50 Hz are achievable.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 311: Symposium O – Phase Transformations in Thin Films–Thermodynamics and Kinetics , 1993 , 161
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

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