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Dynamics of Ion Beam Stimulated Surface Mass Transport to Nanopores

Published online by Cambridge University Press:  01 February 2011

David P. Hoogerheide  and
Jene A. Golovchenko
David P. Hoogerheide
Affiliation:
dphooger@fas.harvard.edu, Harvard University, Department of Physics and School of Engineering and Applied Sciences, Cambridge, MA, 02138, United States
Jene A. Golovchenko
Affiliation:
golovchenko@physics.harvard.edu, Harvard University, Physics, 17 Oxford Street, Cambridge, MA, 02138, United States
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Abstract

We explore the ion beam-induced dynamics of the formation of large features at the edges of nanopores in freestanding silicon nitride membranes. The shape and size of these “nanovolcanoes”, together with the rate at which the nanopores open or close, are shown to be strongly influenced by sample temperature. Volcano formation and pore closing slow and stop at low temperatures and saturate at high temperatures. Nanopore volcano size and closing rates are dependent on initial pore size. We discuss both surface diffusion and viscous flow models in the context of these observed phenomena.

Keywords

ion-solid interactionsnanostructurediffusion
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1020: Symposium GG – Ion-Beam-Based Nanofabrication , 2007 , 1020-GG02-01
Copyright
Copyright © Materials Research Society 2007

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