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Dynamic Annealing Phenomena and the Origin of RTA-Induced “Hairpin” Dislocations

Published online by Cambridge University Press:  25 February 2011

W. Maszara ,
D.K. Sadana ,
G.A. Rozgonyi ,
T. Sands ,
J. Washburn  and
J.J. Wortman
W. Maszara
Affiliation:
1North Carolina State University, Raleigh, North Carolina27695-7916
D.K. Sadana
Affiliation:
1North Carolina State University, Raleigh, North Carolina27695-7916 Microelectronic Center of North Carolina, Research Triangle Park, North Carolina 27709
G.A. Rozgonyi
Affiliation:
1North Carolina State University, Raleigh, North Carolina27695-7916 Microelectronic Center of North Carolina, Research Triangle Park, North Carolina 27709
T. Sands
Affiliation:
Lawrence Berkeley Laboratory, Berkeley, CA 94720
J. Washburn
Affiliation:
Lawrence Berkeley Laboratory, Berkeley, CA 94720
J.J. Wortman
Affiliation:
1North Carolina State University, Raleigh, North Carolina27695-7916
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Abstract

The geometry, origin, and diffusion along hairpin defects in Si were investigated using TEM and SIMS techniques. The defect that grows from the amorphous-crystalline (a/c) interface following solid phase epitaxy growth front was found to be a perfect dislocation with a/2(101) Burgers vector. Misoriented microcrystallites within the a/c transition region are proposed to be nucleation sites for the hairpin dislocations. The density of the crystallites increases with an overall coarsening of the interface which occurs during dynamic annealing processes stimulated by implantation or post-implantation low temperature annealing. Hairpin dislocations were found to pipe-diffuse boron at much higher rates than bulk processes significantly shifting dopant profiles. The diffusion coefficient of boron pipe diffusion at 1150°C was found to be about 104 times higher than the bulk one.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 35: Symposium A – Energy Beam-Solid Interactions and Transient Thermal Processing/1984 , 1984 , 277
Copyright
Copyright © Materials Research Society 1985

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References

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