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Direct Fabrication of All-Inorganic Logic Elements and Microelectromechanical Systems from Nanoparticle Precursors

Published online by Cambridge University Press:  17 March 2011

Colin Bulthaup ,
Eric Wilhelm ,
Brian Hubert ,
Brent Ridley  and
Joe Jacobson
Colin Bulthaup
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
Eric Wilhelm
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
Brian Hubert
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
Brent Ridley
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
Joe Jacobson
Affiliation:
Media Lab, Massachusetts Institute of Technology, Cambridge, MA 02139
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Abstract

Here we describe the fabrication of electrostatic motors by liquid embossing, a contact stamp-based method of patterning liquids with sub-micron resolution. We also demonstrate AFM nano-assembly which can produce sub-40 nm dots and lines by transferring either liquid or solid material from a reservoir to a deposition area. Both of these non-lithographic patterning techniques are applicable to nanocrystal, organic, and polymeric solutions and liquids.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 636: Symposium D – Nonlithographic and Lithographic Methods of Nanofabrication-From Ultralarge Scale , 2000 , D10.4.1
Copyright
Copyright © Materials Research Society 2001

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References

1. Jacobson, J. M. et al. , Mater. Res. Soc. Proc. 581, pp 115–120 (1999).Google Scholar
2. Bulthaup, C. et al. , Mat. Res. Soc. Symp. Proc. 625, 135 (2000).Google Scholar
3. Ridley, B.A., Nivi, B., Jacobson, J.M., Science 286, 746–749 (1999).Google Scholar
4. Kumar, A., Biebuyck, H. A., and Whitesides, G. M., Langmuir 10, 1498 (1994).Google Scholar
5. Xia, Y., Zhao, X-M., Kim, E., and Whitesides, G. M., Chem. Mater. 7, 2332 (1995).Google Scholar
6. Xia, Y., Kim, E., and Whitesides, G. M., J. Electrochem. Soc. 143, 1070 (1996).Google Scholar
7. Xia, Y., Kim, E., Mrksich, M., and Whitesides, G. M., Chem. Mater. 8, 601 (1996).Google Scholar
8. Goetting, L. B., Deng, T., and Whitesides, G. M., Langmuir 15, 1182 (1999).Google Scholar
9. Whidden, T. K. et al. , Nanotechnology 7, 447 (1996).Google Scholar
10. Wang, D., Thomas, S. G., Wang, K. L., Xia, Y., and Whitesides, G. M., Appl. Phys. Lett. 70, 1593 (1997).Google Scholar
11. John, P. M. St., and Craighead, H. G., Appl. Phys. Lett. 68, 1022 (1996).Google Scholar
12. Hu, J. et al. , Appl. Phys. Lett. 71, 2020 (1997).Google Scholar
13. Hu, J., Beck, R. G., Westervelt, R. M., and Whitesides, G. M., Adv. Mater. 10, 574 (1998).Google Scholar
14. Jeon, N. L., Hu, J., Whitesides, G. M., Erhardt, M. K., and Nuzzo, R. G., Adv. Mater. 10, 1466 (1998).Google Scholar
15. Chou, S., Krauss, P., Renstrom, P., Science 272, 85 (1996).Google Scholar
16. Guo, L., Krauss, P. R., and Chou, S. Y., Appl. Phys. Lett. 71, 1881 (1997).Google Scholar
17. Yu, Z., Schablitsky, S. J., and Chou, S. Y., Appl. Phys. Lett. 74, 2381 (1999).Google Scholar
18. Hidber, P. C., Helbig, W., Kim, E., and Whitesides, G. M., Langmuir 12, 1375 (1996).Google Scholar
19. Wang, J., Sun, X., Chen, L., and Chou, S. Y., Appl. Phys. Lett. 75, 2767 (1999).Google Scholar
20. Rogers, J. A., Bao, Z., and Dhar, L., Appl. Phys. Lett. 73, 294 (1998).Google Scholar
21. Kim, E., Xia, Y., and Whitesides, G. M., Nature 376, 581 (1995).Google Scholar
22. Rogers, J. A., Bao, Z., and Raju, V. R., Appl. Phys. Lett. 72, 2716 (1998).Google Scholar
23. Marzolin, C., Smith, S. P., Prentiss, M., and Whitesides, G. M., Adv. Mater. 10, 571 (1998).Google Scholar
24. Schuler, O., Whitesides, G. M., Rogers, J. A., Meier, M., and Dodabalapur, A., Appl. Optics 38, 5799 (1999).Google Scholar
25. Jeon, N. L., Choi, I. S., Xu, B., and Whitesides, G. M., Adv. Mater. 11, 946 (1999).Google Scholar
26. Beh, W. S., Kim, I. T., Qin, D., Xia, Y., and Whitesides, G. M., Adv. Mater. 11, 1038 (1999).Google Scholar
27. Fuller, S.B., Jacobson, J.M., Proc. of IEEE MEMS 2000 Conf., Miyazaki, Japan (2000)Google Scholar
28. Manoharan, H.C., Lutz, C.P. and Eigler, D.M., Nature, 403, 6769, 512–515 (2000).Google Scholar
29. Resch, R., Montoya, N., Koel, B.E., Madhukar, A., Requicha, A.A.G., Will, P., Molecular Imaging Application Note, (1999).Google Scholar
30. Falvo, M.R., Taylor, R.M. II, Helser, A., Chi, V., Brooks, F.P. Jr., Washburn, S., Superfine, R., Nature, 397, 6716, 236–238 (1999).Google Scholar
31. Hong, S., Zhu, J., Mirkin, C.A., Science, 286, 523–525 (1999).Google Scholar