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Direct Experimental Evidence for Monosilane Formation Even after High Temperature Proton Implantation of Crystalline Silicon

Published online by Cambridge University Press:  26 February 2011

Jakub Tatarkiewicz  and
Andrzej Król
Jakub Tatarkiewicz
Affiliation:
Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warszawa, Poland
Andrzej Król
Affiliation:
Department of Physics, SUNY at Stony Brook, Stony Brook, NY 11794-3800
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Abstract

The paper proves experimentally that no multisilanes are formed even after high temperature proton implantation of crystalline silicon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 104 , 1987 , 301
Copyright
Copyright © Materials Research Society 1988

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Footnotes

*

permanent address: Institute of Experimental Physics, Warsaw University, ul. Hoźa 69, 00681 Warszawa, Poland

References

Literature

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