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Different Mechanisms Leading to Superhard Coatings: Stable Nanocomposites and High Biaxial Compressive Stress

Published online by Cambridge University Press:  17 March 2011

S. Veprek ,
P. Karvankova ,
J. Prochazka  and
H. Männling
S. Veprek
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching, Germany, E-mail: veprek@ch.tum.de
P. Karvankova
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching, Germany, E-mail: veprek@ch.tum.de
J. Prochazka
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching, Germany, E-mail: veprek@ch.tum.de
H. Männling
Affiliation:
Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747 Garching, Germany, E-mail: veprek@ch.tum.de
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Abstract

A strong enhancement of the hardness above 40 GPa in thin coatings can be achieved either by the formation of a suitable nanostructure (heterostructures and nanocomposites) or by a large biaxial compressive stress of ≥ 5 GPa. Superhard and thermally fairly stable nanocomposites, such as nc-TiN/a-Si3N4, nc-TiN/a-Si3N4/a-TiSi2, nc-(Ti1-xAlx)N/a-Si3N4 retain their hardness after annealing to 900-1100°C whereas coatings with a high stress, such as HfB2, CrxN/Ni, ZrN/Ni and others soften to ≤ 20 GPa already after their annealing to 400-500°C due to the relaxation of that stress.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 697: Symposium P – Surface Engineering 2001--Fundamentals and Applications , January 2001 , P1.8
Copyright
Copyright © Materials Research Society 2002

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