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Dielectric Properties of Multi-Layer High-K Polymer Composite Films

Published online by Cambridge University Press:  17 March 2011

Wataru Sakai  and
C. K. Chiang
Wataru Sakai
Affiliation:
Polymers Division, National Institute of Standards and Technology Gaithersburg, Maryland 20899-8541, US
C. K. Chiang
Affiliation:
Polymers Division, National Institute of Standards and Technology Gaithersburg, Maryland 20899-8541, US
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Abstract

The electrical properties of thin polymer films are key parameters in the design of both smaller and faster circuit devices in the microelectronics industry. In this study, we made a three-layer film structure, ABA', to investigate the dielectric interaction between two high-K dielectric polymer thin films, A and A', as a function of the thickness of the middle B layer. The Cole-Cole plot showed clear changes with the thickness of the middle B layer. The total capacitances were evaluated with a simple serial three capacitances model. This ABA' structure is thought to be very useful for studying mechanical and thermal properties of thin polymer film system.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 710: Symposia DD – Polymer Interfaces and Thin Films , 2001 , DD6.17.1
Copyright
Copyright © Materials Research Society 2002

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References

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