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Diamond Film CVD Synthesis on Titanium: Experimental Evidence of the Intermediate Phases at the Film/Substrate Interface

Published online by Cambridge University Press:  10 February 2011

M. Rossi ,
M. L. Terranova ,
V. Sessa  and
G. Vitali
M. Rossi
Affiliation:
Dipartimento di Energetica, Università “La Sapienza”, via A. Scarpa 14 - 00161 Roma - Italy
M. L. Terranova
Affiliation:
Dipartimento di Scienze e Tecnologie Chimiche, Università “Tor Vergata”, via della Ricerca Scientifica - 00133 Roma - Italy
V. Sessa
Affiliation:
Dipartimento di Scienze e Tecnologie Chimiche, Università “Tor Vergata”, via della Ricerca Scientifica - 00133 Roma - Italy
G. Vitali
Affiliation:
Dipartimento di Energetica, Università “La Sapienza”, via A. Scarpa 14 - 00161 Roma - Italy
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Abstract

The present findings concern the CVD deposition of diamond films on Ti substrates and the presence of a stratification of other various phases (Titanium Carbide, Titanium Hydride and Graphite) through the thickness of the CVD coatings.

The reflection high energy electron diffraction (RHEED) technique is mainly used to gain insight into the structure of the various phases generated at the diamond/substrate interface.

The experimental results seem to indicate that the structure of the transition layers present at the substrate/film interface play a fundamental role for the control of the heterogeneous nucleation process of the diamond.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 416: Symposium DD – Diamond for Electronic Applications , 1995 , 235
Copyright
Copyright © Materials Research Society 1996

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References

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