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Development of a Robust Design of a Wet Etched Co-integrated Pressure Sensor

Published online by Cambridge University Press:  20 January 2011

Wolfgang Schreiber-Prillwitz ,
Mikko Saukoski ,
Gerhard Chmiel  and
Reinhart Job
Wolfgang Schreiber-Prillwitz
Affiliation:
University of Hagen, Dept. of Mathematics and Computer Science, 58084 Hagen, Germany ELMOS Semiconductor AG, 44227 Dortmund, Germany
Mikko Saukoski
Affiliation:
ELMOS Semiconductor AG, 44227 Dortmund, Germany
Gerhard Chmiel
Affiliation:
ELMOS Semiconductor AG, 44227 Dortmund, Germany
Reinhart Job
Affiliation:
University of Hagen, Dept. of Mathematics and Computer Science, 58084 Hagen, Germany
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Abstract

The performance of a co-integrated silicon pressure sensor for the 1-bar full scale range was optimized. A gain in signal of ca. 5% was calculated and verified by optimizing the piezoresis-tors position on the membrane. The influence of alignment errors between the backside cavity mask and the positions of the piezoresistors on the membrane’s front side were calculated. De-pending on the asymmetry, a maximal electrical signal deviation of 1% was found. The impact of underetching effects (KOH) at the backside mask on electrical signals was also analyzed. Un-deretching has a certain range, alters the membrane size, and has a strong impact on sensor per-formances. In a worst case scenario signal variations caused by underetching could be finally reduced from 15% to 4%.

Keywords

sensormicroelectro-mechanical (MEMS)Si
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s06-03
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1. Schreiber-Prillwitz, W., Saukoski, M., Chmiel, G., Job, R., ECS Transactions, 33(8), 327 (2010)CrossRefGoogle Scholar
2. Tufte, O. N., Chapman, P. W., Long, D., J. Appl. Phys., 33, 3324 (1962)CrossRefGoogle Scholar
3. Thomsen, E. V., Richter, J., Piezo Resistive MEMS Devices: Theory and Applications, http://www2.mic.dtu.dk/research/prototyping/piezo/piezonote2005_ver7.pdf Google Scholar