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Deterministic Synthesis of ZnO Nanorods

Published online by Cambridge University Press:  01 February 2011

Y. W. Heo
Affiliation:
Department of Materials Science and Engineering, University of Florida, P.O. Box 116400, Rhines Hall, Gainesville, FL 32606
V. Varadarajan
Affiliation:
Department of Materials Science and Engineering, University of Florida, P.O. Box 116400, Rhines Hall, Gainesville, FL 32606
M. Kaufman
Affiliation:
Department of Materials Science and Engineering, University of Florida, P.O. Box 116400, Rhines Hall, Gainesville, FL 32606
K. Kim
Affiliation:
Department of Materials Science and Engineering, University of Florida, P.O. Box 116400, Rhines Hall, Gainesville, FL 32606
F. Ren
Affiliation:
Department of Chemical Engineering, University of Florida, Gainesville, FL 32606
P. H. Fleming
Affiliation:
Solid State Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831
D. P. Norton
Affiliation:
Department of Materials Science and Engineering, University of Florida, P.O. Box 116400, Rhines Hall, Gainesville, FL 32606
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Abstract

The deterministic growth of ZnO nanorods using molecular beam epitaxy is reported. The process is catalyst-driven, as single crystal ZnO nanorod growth is realized via nucleation on Ag islands that are distributed on a SiO2-terminated Si substrate surface. Growth occurs at substrate temperatures on the order of 300-500°C. The nanorods exhibit diameters of 15-40 nm and lengths in excess of 1 μm. Nanorod placement can be predefined via location of metal catalyst islands or particles. This, coupled with the relatively low growth temperatures needed, suggests that ZnO nanorods could be integrated on device platforms for numerous applications, including chemical sensors and nanoelectronics.

Type
Research Article
Copyright
Copyright © Materials Research Society 2002

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