Hostname: page-component-7479d7b7d-t6hkb Total loading time: 0 Render date: 2024-07-13T13:16:28.576Z Has data issue: false hasContentIssue false
  • English
  • Français

Determination of Elastic Constants and Viscosity of Amorphous Thin Films From Substrate Curvature

Published online by Cambridge University Press:  16 February 2011

Ann Witvrouw  and
Frans Spaepen
Ann Witvrouw
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138.
Frans Spaepen
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138.
Get access

Abstract

Substrate curvature measurements were used to monitor viscous flow in Pd79Si21 films at temperatures between 100 and 250°C. To determine the viscosity and the change in viscosity the elastic constants of the film were measured by depositing films on pre-bent substrates: E = 10 ± 1 1010 Pa and ν = 0.43 ± 0.04 The activation enthalpy for η is 13 ± 1 kJ/mole.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 188: Symposium K – Thin Films: Stresses and Mechanical Properties II , 1990 , 147
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Nix, W.D., Metall. Trans. A 20A, 2217 (1989).Google Scholar
2. Flinn, P.A., Gardner, D.S., Nix, W.D., IEEE Trans. Electron Devices ED-34(3), 689, 1987.Google Scholar
3. Doerner, M.F., Nix, W.D., CRC Critical Reviews in Solid State and Materials Science 14. 225 (1988).Google Scholar
4. Bevington, P.R., Data Reduction and Error Analysis for the Physical Sciences (McGraw-Hill Book Company, New York, 1969), pp. 164–176.Google Scholar
5. Davis, L.A., Chou, C.P., Tanner, L.E., Ray, R., Scripta Met. 10, 937 (1976).Google Scholar
6. Chou, C.P., Davis, L.A., Narasimhan, M.C., Scripta Met. 11, 417 (1977).Google Scholar
7. Tsao, S.S., Spaepen, F., Proc. 4th Int. Conf. on Rapidly Quenched Metals, Jap. Inst. Metals, Sendai 1, 463 (1981).Google Scholar
8. Chen, H.S., Scripta Met. 9, 411 (1975).Google Scholar
9. Volkert, C.A., Spaepen, F., Scripta Met. 24, 463 (1990).Google Scholar
10. Taub, A.I., Spaepen, F., Acta Met. 28, 1781 (1980).Google Scholar