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Determination of Eigenstresses from Curvature Data

Published online by Cambridge University Press:  15 February 2011

Mauro Ferrari  and
Marie Weber
Mauro Ferrari
Affiliation:
University of California, Berkeley, Department of Civil Engineering, and Department of Materials Science and Minerals Engineering, Berkeley CA
Marie Weber
Affiliation:
University of California, Berkeley, Department of Civil Engineering, Berkeley CA.
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Abstract

Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 221
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. Krulevitch, P., Johnson, G. C. and Howe, R. T., MRS Fall 1991 Meeting, Boston, Symposium D.Google Scholar
2. Stoney, G., Proc. R. Soc. London, 82, 172 (1909).Google Scholar
3. Brenner, A. and Senderoff, S., J. Res. Natl. Bur. Stand, 42, 105 (1949).Google Scholar
4. Ferrari, M., J. Thermal stresses (to appear).Google Scholar