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Determination of as Sticking Coefficients Using Reflection high Energy Electron Diffraction Intensity Oscillations on GaAs

Published online by Cambridge University Press:  28 February 2011

Robert Chow  and
Rouel Fernandez
Robert Chow
Affiliation:
Varian Associates, Thin Film Technology Division, 3550 Bassett Street, Santa Clara, California 95054
Rouel Fernandez
Affiliation:
Varian Associates, Thin Film Technology Division, 3550 Bassett Street, Santa Clara, California 95054
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Abstract

RHEED intensity oscillations were used to investigate As-controlled incorporation rates. The measurements were made under Ga accumulation at the surface of the substrate, and at fluxes and substrate temperatures common for 1.0 micron/hr GaAs growth. The results between the dimer and tetramer As species were compared. The transition between Ga and As controlled incorporation rates was constant within 2.5°C for a constant As flux and was independent of the substrate temperature. Also, the As-controlled incorporation rate curves shows two regions as the substrate temperature increases. At low substrate temperatures, the As incorporation rate is substrate temperature independent. Then at higher substrate temperatures, the As incorporation rate has an arrhenius dependence with a positive activation energy. An interpretation of these results is possible by assigning the maximum sticking coefficient of the tetramer to the region where the As incorporation rate is independent of substrate temperature. This assignment allows one to derive the As (dimers and tetramers) sticking coefficient dependence with substrate temperature. The dimer sticking coefficients are greater that the tetramer sticking coefficients for a given substrate temperature and As flux, and the maximum sticking coefficient of the As dimer was determined to be 0.8 in these experiments.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 145: Symposium A – III-V Heterostructures for Electronic/Photonic Devices , 1989 , 13
Copyright
Copyright © Materials Research Society 1989

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