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Deposition of TiN/NbN Superlattice Hard Coatings by Ionised Magnetron Sputter Deposition

Published online by Cambridge University Press:  01 February 2011

Yi Long ,
Robert J. Stearn ,
Zoe H. Barber ,
Stephen J. Lloyd  and
William J. Clegg
Yi Long
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, CB2, 3QZ, UK.
Robert J. Stearn
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, CB2, 3QZ, UK.
Zoe H. Barber
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, CB2, 3QZ, UK.
Stephen J. Lloyd
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, CB2, 3QZ, UK.
William J. Clegg
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, CB2, 3QZ, UK.
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Abstract

We have investigated the effect of ion bombardment on the structure and hardness of thin coatings of TiN/NbN multilayered structures and monolithic films of both TiN and NbN. A radio frequency coil was used to generate an additional inductively coupled plasma between the substrate and the target enabling the sample to be bombarded by a high flux of relatively low energy ions under the appropriate conditions. It is shown that the effect of such bombardment in the case of the monolithic films is to reduce the porosity. This gave an increase in the hardness of both the TiN and the NbN films up to a power of 100 W (using a coil with a cross-sectional area of 2 × 103 mm2). Further increasing the power density led to a decrease in hardness. TiN/NbN multilayer coatings were made under the optimum deposition conditions for the monolithic materials and gave hardnesses greater than those observed in either TiN or NbN and approximately 50% greater than that predicted by a mixtures rule.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 791: Symposium Q – Mechanical Properties of Nanostructured Materials and Nanocomposites , 2003 , Q5.18
Copyright
Copyright © Materials Research Society 2004

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References

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