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Deposition of Cu Films for Laser Mirror by Partially Ionized Beam Deposition

Published online by Cambridge University Press:  21 February 2011

Seok-Keun Koh ,
Young-Soo Yoon ,
Ki-Hwan Kim ,
Hong-Gui Jang  and
Hyung-Jin Jung
Seok-Keun Koh
Affiliation:
Division of Ceramics, Korea Institute of Science and Technology P.O. box 131, Cheongryang, Seoul, Korea
Young-Soo Yoon
Affiliation:
Division of Ceramics, Korea Institute of Science and Technology P.O. box 131, Cheongryang, Seoul, Korea
Ki-Hwan Kim
Affiliation:
Division of Ceramics, Korea Institute of Science and Technology P.O. box 131, Cheongryang, Seoul, Korea
Hong-Gui Jang
Affiliation:
Division of Ceramics, Korea Institute of Science and Technology P.O. box 131, Cheongryang, Seoul, Korea
Hyung-Jin Jung
Affiliation:
Division of Ceramics, Korea Institute of Science and Technology P.O. box 131, Cheongryang, Seoul, Korea
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Abstract

Partially ionized beam deposition of Cu thin films on glass at room temperature were carried out to fabricate Cu laser mirrors with good structural and reflectance properties. At a constant film thickness of 600 Å, the grain size of as-grown Cu films increased with acceleration voltage, and there was no indication of defects such as cracks and/or large pores in the film surface as shown in scanning electron microscopy images. Root-mean-square(Rms) surface roughnesses of the films with thicknesses of 600 Å were measured by atomic force microscopy. RmS surface roughness increased when acceleration voltage increased from 0 kV to 2 kV, but decreased at the acceleration voltage of 3 kV. RmS surface roughness of the film grown at 4 kV, however, increased again. At the acceleration voltage of 3 kV, reflectance of the films increased with the film thickness until 600 Å and decreased at the film thickness of 800 Å. The reflectance results showed that the Cu film deposited at 3 kV had higher reflectance than that of others. Our results suggest that it is possible to grow the Cu film with good structural and optical properties on glass substrate at room temperature by partially ionized beam deposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 396: Symposium A – Ion-Solid Interactions for Materials Modification and Processing , 1995 , 575
Copyright
Copyright © Materials Research Society 1996

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