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Defect Energy Levels in HfO2, ZrO2, La2O3 and SrTiO3

Published online by Cambridge University Press:  28 July 2011

K Xiong ,
P W Peacock  and
J Robertson
K Xiong
Affiliation:
Engineering Dept, Cambridge University, Cambridge CB2 1PZ, UK
P W Peacock
Affiliation:
Engineering Dept, Cambridge University, Cambridge CB2 1PZ, UK
J Robertson
Affiliation:
Engineering Dept, Cambridge University, Cambridge CB2 1PZ, UK
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Abstract

Defect energy levels of oxygen vacancies in various high K oxides HfO2, ZrO2, La2O3 and SrTiO3 have been calculated using methods which give the correct band gap, such as the screened exchange and weighted density approximation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 811: Symposia D/E – Integration of Advanced Micro-and Nanelectronic Devices-Critical Issues and Solutions , 2004 , D6.4
Copyright
Copyright © Materials Research Society 2004

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References

1. Wilk, G D, Wallace, R M, Anthony, J M, J App Phys 89 5243 (2001)Google Scholar
2. Robertson, J, J Vac Sci Technol B 18 1785 (2000)Google Scholar
3. Gusev, E, et al. , IEDM Tech Digest 451 (2001)Google Scholar
4. Fischetti, M V, Neumayer, D, Cartier, E, J App Phys 90 4587 (2001)Google Scholar
5. Zafar, S, Callegari, A, Gusev, E, Fischetti, M V, J App Phys 93 9298 (2003)Google Scholar
6. Bersuker, G et al. , presently at Motorola workshop on Computational Materials and Electronics, Austin (Nov 2003)Google Scholar
7. Kang, A Y, Lenahan, P M, Conley, J F, App Phys Lett 83 3407 (2003)Google Scholar
8. Matta, J et al. , Phys Chem Chem Phys 1 4975 (1999)Google Scholar
9. Foster, A S, Sulimov, V B, Gejo, F L, Shluger, A L, Nieminen, R N, Phys Rev B 64 224108 (2001)Google Scholar
10. Foster, A S, Gejo, F L, Shluger, A L, Nieminen, R N, Phys Rev B 65 174117 (2002)Google Scholar
11. Milman, V, Winkler, B, White, J A, Pickard, C J, Payne, M C, Int J Quantum Chem 77 895 (2000)Google Scholar
12. Hybertsen, M S, Louie, S G, Phys Rev B 34 5390 (1986)Google Scholar
13. Kralik, B, Chang, E K, Louie, S G, Phys Rev B 57 7027 (1998)Google Scholar
14. Muscat, J, Wander, A, Harrison, N M, Chem Phys Lett 342 397 (2001)Google Scholar
15. Bylander, B M, Kleinman, L, Phys Rev B 41 7868 (1990)Google Scholar
16. Geller, C B, Wolf, W, Picozzi, S, Continenza, A, Ashi, R, Mannstadt, W, Freeman, A J, Wimmer, E, App Phys Lett 79 368 (2001)Google Scholar
17. Asahi, R et al. , Thin Solid Films 411 101 (2002)Google Scholar
18. Seidl, A, Gorling, A, Vogl, P, Majewski, J A, Levy, M, Phys Rev B 53 3764 (1996)Google Scholar
19. Nieminen, R, J Phys Conden Mat 15 4387 (2003)Google Scholar
20. Alonso, J A, Girifalco, L A, Phys Rev B 17 3735 (1976)Google Scholar
21. Charlesworth, J P A, Phys Rev B 53 12666 (1996)Google Scholar
22. Rushton, P P, Tozer, D J, Clark, S J, Phys Rev B 65 235203 (2002)Google Scholar
23. Peacock, P W, Robertson, J, J App Phys 92 4712 (2002)Google Scholar