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The Cubic to Hexagonal Phase Transition in Spray Deposited Tin-Doped Indium Oxide Films

Published online by Cambridge University Press:  10 February 2011

A. Malik ,
R. Nunes  and
R. Martins
A. Malik
Affiliation:
FCT-UNL/CEMOP-UNINOVA, Quinta da Torre, Monte de Caparica, P-2825, Portugal.
R. Nunes
Affiliation:
FCT-UNL/CEMOP-UNINOVA, Quinta da Torre, Monte de Caparica, P-2825, Portugal.
R. Martins
Affiliation:
FCT-UNL/CEMOP-UNINOVA, Quinta da Torre, Monte de Caparica, P-2825, Portugal.
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Abstract

This work's aim is to report for the first time the cubic to hexagonal phase transition in tindoped In2O3 films with a Sn/In atomic ratio of 0.03, fabricated at low temperature and normal pressure from alcoholic solution of InCl3 and SnCI4. The performed X-ray diffraction measurements show a difference between crystallographic symmetry of thin (100 nm) and thick (400 nm) films prepared in the same conditions: the structure of thick films can be related to high pressure In2O3 hexagonal system with a preferred orientation of c-axis parallel to the substrate surface, while thin films present a cubic symmetry with columnar (400) grain orientation. Phase transition nature is connected with non-axial tensile deformation of indium oxide grid due to insertion of chlorine ions in the position of two diagonally opposite oxygen vacancies in In2O3 network.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 481: Symposium P – Science and Technology of Semiconductor Surface Preparation , 1997 , 599
Copyright
Copyright © Materials Research Society 1998

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References

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