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Crystallization of Molybdenum Disulfide Films Deposited by Pulsed Laser Ablation

Published online by Cambridge University Press:  26 February 2011

J. S. Zabinski ,
M. S. Donley ,
P. J. John ,
V. J. Dyhouse ,
A. J. Safriet  and
N. T. McDevitt
J. S. Zabinski
Affiliation:
WRDC/MLBT, Materials Laboratory, Wright-Patterson AFB, OH 45433–6533
M. S. Donley
Affiliation:
WRDC/MLBT, Materials Laboratory, Wright-Patterson AFB, OH 45433–6533
P. J. John
Affiliation:
University of Dayton Research Institute, Dayton, OH 45469–0168
V. J. Dyhouse
Affiliation:
University of Dayton Research Institute, Dayton, OH 45469–0168
A. J. Safriet
Affiliation:
University of Dayton Research Institute, Dayton, OH 45469–0168
N. T. McDevitt
Affiliation:
RAMSPEC Research, 4399 E. Mohave Dr., Dayton, OH 45431
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Abstract

Pulsed laser ablation (PLA) is an emerging technology that provides a mechanism to deposit lubricious films and to tailor film properties by the appropriate choice of substrate materials, deposition parameters and post deposition treatments. The properties of MoS2 films deposited by PLA are evaluated as a function of: (1) substrate material, (2) duration of post deposition annealing treatments using 248 nm laser radiation and (3) substrate temperature during deposition. The chemistry and crystal structure of the different films are determined using small angle X-ray diffraction (XRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectroscopy (RBS). The tribological properties of the films are then evaluated as a function of their chemistry and crystal structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 195
Copyright
Copyright © Materials Research Society 1991

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