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Continuum Modeling of Charged Particle Transport: RF Breakdown and Discharges of SF6

Published online by Cambridge University Press:  28 February 2011

Brian E. Thompson ,
Herbert H. Sawun  and
Aaron Owens
Brian E. Thompson
Affiliation:
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
Herbert H. Sawun
Affiliation:
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
Aaron Owens
Affiliation:
Central Research and Development Department, E.I.du Pont de Nemours and Company, Inc., Wilmington, DE 19898
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Abstract

Continuity equations for the concentration of electrons, positive ions, and negative ions were constructed and solved to predict rf breakdown voltages and the electrical properties of SF, discharges.These balances for the three types of charged species include terms for convection (electric field-driven fluxes), diffusion, and reactions (ionization, electron attachment, and negative-positive ion recombination).The mobilities, diffusivities, and reaction rate coefficients necessary for the rf discharge model are based on reported measurements and calculations of these parameters in dc electric fields.The electric fields developed in the rf discharge are calculated from Poisson's equation and applied voltage conditions.Predictions based on this model are compared with measured rf breakdown characteristics of SF6.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 68: Symposium C – Plasma Processing , 1986 , 243
Copyright
Copyright © Materials Research Society 1986

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