Hostname: page-component-848d4c4894-r5zm4 Total loading time: 0 Render date: 2024-06-24T11:43:51.083Z Has data issue: false hasContentIssue false
  • English
  • Français

Contamination Effects in Mo/Ni Superlattices

Published online by Cambridge University Press:  15 February 2011

Steven M. Hues  and
John L. Makous
Steven M. Hues
Affiliation:
Chemistry Division, Naval Research Laboratory, Washington, D.C. USA 20375–5000
John L. Makous
Affiliation:
Chemistry Division, Naval Research Laboratory, Washington, D.C. USA 20375–5000
Get access

Abstract

A softening of the shear elastic constant c44 has been observed previously in Mo/Ni superlattices as a function of decreasing bilayer thickness below approximately 100 Å.[1] We have prepared a series of Mo/Ni superlattice films by ion beam sputtering doped with varying concentrations of either aluminum or oxygen. The chemical and structural properties of these films were then determined using x-ray diffraction (XRD) and Auger electron spectroscopy (AES). The shear elastic properties were characterized by measuring the surface acoustic wave (SAW) velocity of the deposited films. We demonstrate structural and elastic property effects resulting from Al and O impurity incorporation in Mo/Ni multilayers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 229: Symposium Q – Structure/Property Relationships for Metal/Metal Interfaces , 1991 , 91
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Khan, M.R., Chun, C.S.L., Felcher, G.P., Grimsditch, M., Kueny, A., Falco, C.M., and Schuller, I.K., Phys. Rev. B 27, 7186 (1983).Google Scholar
2. Kueny, A., Grimsditch, M., Miyano, K., Banerjee, I., Falco, C. M., and Schuller, I. K., Phys. Rev. Lett. 48, 166 (1982).CrossRefGoogle Scholar
3. Makous, J.L. and Hues, S.M., Phys. Rev. B, submitted.Google Scholar
4. Davis, L.E., McDonald, N.C., Palmberg, P.W., Riach, G.E., and Weber, R.E., Handbook of Aueer Electron Spectroscopy. 2nd ed. (Physical Electronics, MN, 1976).Google Scholar
5. Danner, R., Huebener, R.P., Chun, C.S.L., Grimsditch, M., and Schuller, I.K., Phys. Rev. B 33, 3696 (1986).Google Scholar
6. Jang, J.S.C. and Koch, C.C., J. Mater. Res. 5, 498 (1990).Google Scholar
7. A Handbook of Lattice Spacing and Structures of Metals and Alloys, ed. by Pearson, W.B. (Pergamon Press, Oxford, 1967).Google Scholar
8. Wallow, F., Neite, G., Schröer, W., and Nembach, E., Phys. Status Solidi A99, 483 (1987).Google Scholar
9. Salma, K. and Alers, J.A., Phys. Status Solidi A41, 241 (1977).Google Scholar
10. Gillen, G., Phelps, J., Nelson, R., Williams, P., and Hues, S.M., Surf. and Interface Anal. 14, 771 (1989).CrossRefGoogle Scholar
11. Handbook of Materials Science. I, edited by Lynch, C.T. (CRC Press, Cleveland, OH, 1974) pp. 300–302.Google Scholar
12. Klug, H.P. and Alexander, L.E., in X-ray Diffraction Procedures. 2nd ed. (Wiley, New York, 1974), chap. 9.Google Scholar