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A Comparison of Ferroelectric thin Films Prepared by Sol-Gel, Metalorganic Deposition and Photochemical Methods

Published online by Cambridge University Press:  10 February 2011

Y. Shi ,
S. L. Blair ,
I. Yaroslavsky  and
R. H. Hill
Y. Shi
Affiliation:
Department of Chemistry, Simon Fraser University, Burnaby, BC, V5A 1S 6 Canada
S. L. Blair
Affiliation:
Department of Chemistry, Simon Fraser University, Burnaby, BC, V5A 1S 6 Canada
I. Yaroslavsky
Affiliation:
Department of Chemistry, Simon Fraser University, Burnaby, BC, V5A 1S 6 Canada
R. H. Hill
Affiliation:
Department of Chemistry, Simon Fraser University, Burnaby, BC, V5A 1S 6 Canada
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Abstract

The process for generating films of Ba0.5Sr0.5TiO3, and PbZr0.48Ti0.52O3 by photochemical deposition from metal-organic thin films has been investigated. Films have also been prepared by metal-organic and sol-gel deposition for comparison with the photochemical method. All three methods could produce crystalline films of the target materials. Studies of the heating of the amorphous films prepared by each of the methods indicated that similar crystalline films could be prepared by the different methods. Under some conditions the photochemical methods gave the highest degree of orientation of the crystalline films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 495: Symposium W – Chemical Aspects of Electronic Ceramics Processing , 1997 , 233
Copyright
Copyright © Materials Research Society 1998

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References

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