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A Comparison of Deep Levels Generated In InP by Proton and Deuteron Bombardment

Published online by Cambridge University Press:  25 February 2011

A. T. Macrander  and
B. Schwartz
A. T. Macrander
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey, USA
B. Schwartz
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey, USA
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Abstract

A predominant deep level which has an activation energy of 0.4 eV was found to have been formed in the region between the surface and the end-of-range of 200 keV ions. In the fluence range 1012 − 1013cm−2 essentially no difference between the deep level spectra for proton and deuteron bombardments was found.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 35: Symposium A – Energy Beam-Solid Interactions and Transient Thermal Processing/1984 , 1984 , 293
Copyright
Copyright © Materials Research Society 1985

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References

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