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Combine spectroscopic ellipsometry and grazing x-ray reflectance for fine characterization of complex epitaxial structures

Published online by Cambridge University Press:  15 February 2011

P. Boher  and
J. L. Stehle
P. Boher
Affiliation:
SOPRA S.A., 26 rue Pierre Joigneaux, 92270 Bois-Colombes (France)
J. L. Stehle
Affiliation:
SOPRA S.A., 26 rue Pierre Joigneaux, 92270 Bois-Colombes (France)
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Abstractm

Spectroscopic Ellipsometry (SE) and Grazing X-ray Reflectance (GXR) techniques are applied on different III-V epitaxial structures in order to extract accurately their structural information. Thickness information are obtained directly from Fourier transformation of the GXR spectra and confirmed by simulation of the reflectance curve. Compositions are deduced from SE regression using GXR thickness as input values. Examples on monolayer and bilayer structures are first remembered. Then the potentiality of the method is demonstrated to more complex systems (multilayer mirrors and HEMT structures).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 406: Symposium L – Diagnostic Techniques for Semiconductor Materials Processing , 1995 , 515
Copyright
Copyright © Materials Research Society 1996

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References

(1) Robbins, D.J., Calcott, P., Leong, W.Y., Appl. Phys. Lett., 59, 1991, p.1350 Google Scholar
(2) Iyer, S.S., Patton, G.L., Stork, J.M.C., Meyerson, B.S., Harame, D.L., IEEE Trans., ED–36, 1993, p. 2043 Google Scholar
(3) Boher, P., Houdy, P., Nanometric multilayers for x-ray optics: some examples for x-ray lasers, Conference on coherent and incoherent VUV and XUV sources, UVX 92, Carry le Rouet, Marseille, France, 13–15 Avril 1992 (invited paper), Annales de Physique, N°3, vol. 17 1992 Google Scholar
(4) Pickering, C., J. of Mineral, Metals and Material Society, 46, N°9, 1994, pp.60–64 Google Scholar
(5) Boher, P., Workshop International on Spectroscopic Ellipsometry, WISE, Erlangen, february 9–11, 1995 Google Scholar
(6) Boher, P., Piel, J.P., Stehle, J.L., To be published in J.of Crystal Growth, 1995 Google Scholar
(7) Boher, P., Houdy, P., Schiller, C., J. Appl. Phys., 68, 1990, p. 6133 Google Scholar
(8) Bridou, F., Pardo, B., J. Phys. III, 4, 1994, p. 1523 Google Scholar