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Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics

Published online by Cambridge University Press:  29 July 2011

Yoeri van de Burgt ,
Yves Bellouard ,
Rajesh Mandamparambil  and
Andreas Dietzel
Yoeri van de Burgt*
Affiliation:
Department of Mechanical Engineering, Eindhoven University Technology, Den Dolech 2, Eindhoven, The Netherlands. Holst Centre/TNO – Netherlands Organization for Applied Scientific Research, HTC31, Eindhoven, The Netherlands.
Yves Bellouard
Affiliation:
Department of Mechanical Engineering, Eindhoven University Technology, Den Dolech 2, Eindhoven, The Netherlands.
Rajesh Mandamparambil
Affiliation:
Holst Centre/TNO – Netherlands Organization for Applied Scientific Research, HTC31, Eindhoven, The Netherlands.
Andreas Dietzel
Affiliation:
Department of Mechanical Engineering, Eindhoven University Technology, Den Dolech 2, Eindhoven, The Netherlands. Holst Centre/TNO – Netherlands Organization for Applied Scientific Research, HTC31, Eindhoven, The Netherlands.
*
*Tel: +31402472186. E-mail: y.b.v.d.burgt@tue.nl
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Abstract

A feedback control mechanism based on infrared radiation monitoring coupled with reflectivity information was developed to control the temperature of a laser assisted chemical vapor deposition process for the growth of carbon nanotube forests. An infrared laser operating at 808 nm is focused on a silicon substrate containing a 20 nm-aluminum-oxide layer and a 1.5 nm-iron catalyst layer. The growth takes place in an argon/ hydrogen/ ethylene gaseous environment. SEM and Raman spectroscopy analysis show that good controllability and reproducibility is achieved over multiple experiments.

Keywords

laser-induced reactionchemical vapor deposition (CVD) (chemical reaction)Raman spectroscopy
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1365: Symposium TT – Laser-Material Interactions at Micro/Nanoscales , 2011 , mrss11-1365-tt09-01
Copyright
Copyright © Materials Research Society 2011

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References

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