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Chemistry and Deposition Driven by Monoenergetic Synchrotron Radiation: Initial Studies of Condensed Silanes and Water on Noble Metals

Published online by Cambridge University Press:  21 February 2011

J.F. Moore ,
Sanjay Chaturvedi  and
DR. Strongest
J.F. Moore
Affiliation:
Department of Chemistry, State University of New York, Stony Brook, N.Y. 11794–3400 Physics Department, Brookhaven National Laboratory, Upton, N.Y. 11973
Sanjay Chaturvedi
Affiliation:
Physics Department, Brookhaven National Laboratory, Upton, N.Y. 11973
DR. Strongest
Affiliation:
Physics Department, Brookhaven National Laboratory, Upton, N.Y. 11973
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Abstract

We extend previous work in broadband synchrotron radiation (SR) excitation of condensed multilayers to the study of reactions driven by monoenergetic SR. The long term goal of this work is to understand the importance of core-level excitation on the reactions that lead to materials growth. Results are presented for two systems of interest: formation of silica from Si(CH3)4 and H20 mixtures with 90 eV irradiation (below the core levels) and the energy dependence of the reaction of SiH4 and H2O.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 561
Copyright
Copyright © Materials Research Society 1995

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References

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