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Chemical Vapor Deposition of Binary Metal Germanides

Published online by Cambridge University Press:  21 February 2011

M.J. Hampden-Smith ,
J. Garvey ,
D. Lei  and
J.C. Huffman
M.J. Hampden-Smith
Affiliation:
Department of Chemistry and Center for Micro-Engineered Ceramics, University of New Mexico, Albuquerque, NM 87131.
J. Garvey
Affiliation:
Department of Chemistry and Center for Micro-Engineered Ceramics, University of New Mexico, Albuquerque, NM 87131.
D. Lei
Affiliation:
Department of Chemistry and Center for Micro-Engineered Ceramics, University of New Mexico, Albuquerque, NM 87131.
J.C. Huffman
Affiliation:
Molecular Structure Center, Indiana University, Bloomington IN 47405.
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Abstract

A series of transition metal substituted germacyclopent-3-ene compounds containing transition metal-germanium bonds have been prepared with supporting ligands which are designed to be easily removed either thermally or photochemically. In solution, model thermal decomposition experiments show that either the geramanium or the transition metal substituents may be removed, depending on the nature of the metal. Preliminary hot-wall CVD experiments using manganese and cobalt derivatives result in films with small grain size.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 187: Symposium J – Thin Film Structures and Phase Stability , 1990 , 187
Copyright
Copyright © Materials Research Society 1990

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