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Chemical stability studies of thermally-carbonized porous silicon

Published online by Cambridge University Press:  17 March 2011

J. Salonen ,
V-P. Lehto ,
M. Björkqvist ,
E. Laine  and
L. Niinistö
J. Salonen
Affiliation:
Department of Physics, University of Turku, FIN-20014 Turku, Finland
V-P. Lehto
Affiliation:
Department of Physics, University of Turku, FIN-20014 Turku, Finland
M. Björkqvist
Affiliation:
Department of Physics, University of Turku, FIN-20014 Turku, Finland
E. Laine
Affiliation:
Department of Physics, University of Turku, FIN-20014 Turku, Finland
L. Niinistö
Affiliation:
Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, FIN-02015 Espoo, Finland
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Abstract

We have studied chemical stability of thermally-carbonized porous silicon (PS). The initial hydrogen termination of PS has been replaced by carbon using thermal dissociation of acetelyne molecules. This kind of carbonized surface has been found to be at least as stable in humid atmosphere as a thermally-oxidized PS surface. It is also found to be stable in an aqueous KOH and HF. In-vitro studies of tissue compatible in simulated human fluid indicate improved stability and that the carbonized surface could be bioactive.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 638: Symposium F – Microcrystaline & Nanocrystalline Semiconductors-2000 , 2000 , F14.19.1
Copyright
Copyright © Materials Research Society 2001

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