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Characterizing Surfaces and Overlying Multilayer Structures Using Grazing Incidence X-Ray Reflectivity

Published online by Cambridge University Press:  15 February 2011

Joseph Pedulla ,
Richard D. Deslates ,
Karsten D. Joensen  and
Paul Gorenstein
Joseph Pedulla
Affiliation:
J. Pedulla & Associates, Silver Spring, MD, Joseph.Pedulla@NIST.GOV
Richard D. Deslates
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD,
Karsten D. Joensen
Affiliation:
Harvard-Smithsonian Center for Astrophysics, Cambridge, MA.
Paul Gorenstein
Affiliation:
Harvard-Smithsonian Center for Astrophysics, Cambridge, MA.
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Abstract

A proposed hard x-ray (>10 keV) telescope design uses multilayers on gold coated replica substrates. We investigated the grazing incidence x-ray reflectivity (0.154 nm) of super polished fused silica, gold coated fused silica, and mutilayers deposited on each. Gold coatings of 100 nm were deposited by both magnetron sputtering and ion beam sputtering. Carbon/nickel multilayers (20 layer pair with 4.0 nm d-spacing) were deposited by ion beam sputtering. We report the results of specular and diffuse reflectivity characterizations of these samples. The easured x-ray reflectivities are compared to model calculations evaluating film thickness, ensity, optical properties, and interface roughness/diffusion. It is concluded that substrate and film quality (roughness and density) can be determined by grazing incidence reflectivity measurements and correlated to final multilayer reflectivity and model calculations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 219
Copyright
Copyright © Materials Research Society 1996

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References

1. Joensen, K. D., Gorenstein, P., Citterio, O., Hoghoj, P., Anderson, I., Schaerpf, O., “Hard X-ray Wolter-I telescope using broad-band multilayer coatings on replica substrates: Problems and Solutions,” in Multilayer and Grazing Incidence X-ray/EUV Optics, Hoover, R. B. and Walker, A. B. C., Editors, Proc. SPIE 2515, 146–161 (1995).Google Scholar
2. Pedulla, J., Bartos, A., and Desslattes, R. D., in Physics of X-ray Multilayer Structures 1994, Opt. Soc. Am., Technical Digest Series, 6, 31–34 (1994).Google Scholar
3. K.Tanner, B., Miles, S. J., Bowen, D. K., Hart, L., and Loxley, N., “X-ray reflectometry from semiconductor surfaces and interfaces,” in Advances in Surface and Thin Film Diffraction, Huang, T.C., Cohen, P.I., and Eaglesham, D.J., Editors, Mater. Res. Soc. Symp. Proc. 208, 345–350 (1991).Google Scholar
4. Renaud, G., “Characterization of interfaces by grazing incidence X-ray scattering”, J. Phys. III France 4, 1797–1810 (1994).Google Scholar
5. Pedulla, J. and Deslattes, R. D., “Production and Characterization of Ion Beam Sputtered Multilayers,” in Multilayer and Grazing Incidence X-ray/EUV Optics, Hoover, R. B. and Walker, A. B. C., Editors, Proc. SPIE 2011, 299–309 (1993).Google Scholar
6. Caticha, A., “Dynamical theory of x-ray diffraction by multilayered structures,” Phys. Rev. B 49, 33 (1994).Google Scholar