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Characterization of Ion Implanted Silicon by Spectroscopic Ellipsometry and Cross Section Transmission Electron Microscopy

Published online by Cambridge University Press:  25 February 2011

P. J. Mcmarr ,
K. Vedam  and
J. Narayan
P. J. Mcmarr
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
K. Vedam
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
J. Narayan
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802 Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN 37380
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Abstract

This paper deals with the application of spectroscopic ellipsometry (SE) and cross-section transmission electron microscopy (XTEM), to the characterization of damaged surface layers in ion implanted Si single crystal. Si samples of 2–6Ω·cm resistivity and <100> orientation were implanted with 28Si+ ions in the dose range of 1.0 × 1016–1.5 × 1016 ions/cm2 using ion energies of 100 and 200 keV. Ion current densities were varied from 6 to 200 μA/cm2. Depth profiles of the implanted samples were evaluated from the spectroscopic ellipsometry data. These calculated profiles were compared with the TEM micrographs of the cross sections of the samples. Excellent agreement is obtained between the two characterization techniques. The characteristics of the depth profiles of the samples, as established by the two techniques, is shown to be the result of annealing occuring during implantation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 27: Symposium E – Ion Implantation and Ion Beam Processing of Materials , 1983 , 299
Copyright
Copyright © Materials Research Society 1984

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References

REFERENCES

[1] Adams, J.R. and Bashura, N.M., Surface Sci. 49 (1975) 441.Google Scholar
[2] Sadana, D.K., Stratham, M., Washburn, J. and Booker, G.R., J. Appl. Phys. 51, 5718 (1980).Google Scholar
[3] Lohner, T., Mezey, G., Köta, E., Pâszti, F., Manuaba, A. and Gyulai, J., Nuclear Instruments and Methods 199 (1982) 405.Google Scholar
[4] Azzam, R.M.A. and Bashara, N.M., Ellipsometry and Polarized Light (North Holland, Amsterdam, 1977).Google Scholar
[5] Theeten, J.B. in Proceedings of the Fourth Interantional Conference on Ellipsometry, edited by Muller, R.H., Azzam, R.M.A. and Aspnes, D.E. (North Holland, Amsterdam, 1980),Google Scholar
Surf. Sci. 96, (1980), 275.Google Scholar
[6] Aspnes, D.E., Schwartz, G.P., Gualtieri, G.J., Studna, A.A. and Schwartz, B., J. Electrochem. Soc., Vol. 128, No. 3, 590 (1981).Google Scholar
[7] Erman, M. and Frimk, P.M., Appl. Phys. Lett. 43, 285 (1983).Google Scholar
[8] Theeten, J.B. and Aspnes, D.E., Thin Solid Films, 60 (1979) 182–192.Google Scholar
[9] Aspnes, D.E. and Studna, A.A., Appl. Opt. 14, No. 1 (1975) 220.Google Scholar
[10] Aspnes, D.E., J. Opt. Soc. Am. 64, 639 (1974).Google Scholar
[11] Aspnes, D.E., in Optical Properties of Solids/New Developments, Seraphin, B.O., Ed. (North Holland, Amsterdam) 800–816.Google Scholar
[12] Muller, R.H., Surface Sci. 56 (1976) 19–36.Google Scholar
[13] Narayan, J. and Holland, O.W., Phys. Stat. Solidi 73, 242 (1982).Google Scholar
[14] Vedam, K., Rai, R., Lukes, F. and Srinivasan, R., J. Opt. Soc. Am. 58, 526 (1968).Google Scholar
[15] Aspnes, D.E., J. Vac. Sci. and Technol., Vol. 17, No. 5 (1980) 1057–60.Google Scholar
[16] Ermen, M. and Theeten, J.B., Surface and Interface Analysis, Vol. 4, No. 3, 98 (1982).Google Scholar
[17] Bruggemann, S.A.G., Ann. Phys. (Leipzig) 24, 636 (1935).Google Scholar
[18] Bagley, B.G., Aspnes, D.E., Adams, A.C. and Mogab, C.J., Appl. Phys. Lett. 38, 56 (1981).Google Scholar
[19] Aspnes, D.E., Theeten, J.B. and Hottier, F., Phys. Rev. 20 B, 3292 (1979).Google Scholar
[20] Ross, R.C. and Messier, R., J. Appl. Phys. 52(8), 1981, pp. 5329–5339.Google Scholar
[21] Aspnes, D.E. and Studna, A.A., Surface Sci. 96, 294 (1980).Google Scholar