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Beta-SiC Synthesis in a Thermal Argon Plasma Jet Reactor

Published online by Cambridge University Press:  25 February 2011

Peter C. Kong  and
E. Pfender
Peter C. Kong
Affiliation:
Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455.
E. Pfender
Affiliation:
Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455.
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Abstract

Ultrafine beta-SiC powders are synthesized in a thermal argon plasma jet reactor by a reaction between methane and silicon monoxide. High temperatures (>10000 K) and rapid quench rates (>106 K/s) lead to a high degree of super-saturation of the chemical vapor, resulting in homogeneous nucleation of ultrafine SiC particles. The maximum conversion of SiO to SiC determined by thermogravimetric analysis is 97%. Particle size analyses show a bimodal distribution with the majority of the particles falling in a size range from 2 to 40 nm. Larger particles with sizes larger than 80 nm are also observed. Characteristically-shaped SiC single-crystal platelets are observed throughout this work.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 98: Symposium K – Plasma Processing and Synthesis of Materials II , 1987 , 377
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

[1] Knippenberg, W.F., Philips Res. Reports, 18 (30), Chapters 1 and 2 (1963).Google Scholar
[2] Harris, L.A., Kennedy, C.R., Wei, C.T., Jeffers, F.P., J. Am. Ceram. Soc., 67 (6), C–121 (1984).Google Scholar
[3] Wei, C.T., J. Am. Ceram. Soc., 66 (7), C–111 (1983).Google Scholar
[4] Kato, A., Okabe, Y., Hojo, J., J. Japan Soc. Powder and Powder Metall., 27 (1), 32 (1982).Google Scholar
[5] Inukai, T., J. Japan Soc. Powder and Powder Metall., 27 (8), 249 (1980).Google Scholar
[6] de Pous, O., Mollard, F., Lux, B.,Symp. Proc. 3rd Int. Symp. Plasma Chem., 3, S–4 (1977).Google Scholar
[7] Salenges, R.M., Ind. Eng. Chem. Prod. Res. Develop., II (2), 230 (1977).Google Scholar
[8] Canteloup, J., Mocellin, A., special Ceramics, 6, 209 (1975).Google Scholar
[9] Vogt, G.J., Hollabaugh, C.M., Hull, D.E., Newkirk, L.R., Petrovic, J.J., Mat. Res. Soc. Symp. Proc., 30, 283 (1984).Google Scholar
[10] Sayce, I.G., Selton, B., Special Ceramics, 5, 157 (1972).Google Scholar
[11] Kuhn, W.E., Ultrafine Particles, P.156, John Wiley & Sons (1963).Google Scholar
[12] Ando, Y., Ohkohchi, M., J.Crystal Growth, 60, 147 (1982).Google Scholar
[13] Besmann, T.M., Oak Ridge National Laboratory, Oak Ridge Report ORNL-TM-5775 (1977).Google Scholar
[14] Kong, P., Huang, T.T., Pfender, E.; IEEE Trans. on Plasma Sci., PS-14 (4), 357 (1986).Google Scholar
[15] Kong, P.C., Pfender, E., Langmuir, 3 (2), 259 (1987).Google Scholar
[16] Kong, P.C., Ph.D.Thesis, University of Minnesota (1985).Google Scholar
[17] Ronsheim, P., Mazza, A., Christensen, A.N., Plasma Chemistry and Plasmas Processing, 1 (2), 135 (1981).Google Scholar
[18] Mitrofanov, B., Pfender, E., Ronsheim, P., Toth, L.E., Mat. Sci. and Eng., 48, 21 (1981).Google Scholar
[19] Ronsheim, P.A., Ph.D Thesis, University of Minnesota (1981).Google Scholar