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”Automatized” Peel Testing: Calculated Stresses and Deflections in the Film

Published online by Cambridge University Press:  21 February 2011

Ephraim Suhir
Ephraim Suhir*
Affiliation:
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, New Jersey 07974
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Abstract

Film adhesion, which is an important reliability factor in many microelectronic structures, is usually evaluated by peel testing. The loading and the peel angle in peel tests can be controlled best if these tests are “automatized”, which could be done, for instance, by applying air pressure to a film through an opening in the substrate. We consider a rectangular opening and determine, how this pressure is related to the peel (membrane) loading and peel angle for the given film material and thickness. Our study is based on von-Kármán's equations for large deflections of plates. The obtained results provide mechanical fundamentals for a rational physical design of a peel test vehicle.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 154: Symposium K – Electronic Packaging Materials Science IV , 1989 , 305
Copyright
Copyright © Materials Research Society 1989

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References

1. Tai, K.-L., Dept. 11528, private communications.Google Scholar
2. von, Kármán, T. V., “Encyklopädie der Mathematischen Wissenschaften”, Band 4, 1910.Google Scholar
3. Timoshenko, S. P., “Theory of Plates and Shells”, 2-nd ed., in collaboration with S., Woinowsky-Krieger, McGraw-Hill Book Company, Inc., New York, 1959.Google Scholar
4. Suhir, E. and Luginin, O., “The assessment of the effect of nonlinearity on the vibration parameters of rectangular plates, subjected to shock loading”, in “Naval Architecture”, Collected Articles, No. 22, Kharkov Univ., Kharkov, U.S.S.R., 1974 (in Russian).Google Scholar