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a-Si:H TFTs Patterned Using Laser-Printed Toner

Published online by Cambridge University Press:  10 February 2011

Helena Glesková ,
S. Wagner  and
D. S. Shen
Helena Glesková
Affiliation:
Princeton University, Department of Electrical Engineering, Princeton, NJ 08544
S. Wagner
Affiliation:
Princeton University, Department of Electrical Engineering, Princeton, NJ 08544
D. S. Shen
Affiliation:
University of Alabama in Huntsville, Department of Electrical and Computer Engineering, Huntsville, AL 35899
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Abstract

We fabricated top-gate amorphous silicon thin-film transistors (a-Si:H TFTs) on alkali-free glass foil, for the first time using laser-printed toner for the patterning of each layer. The toner for the first mask level was applied by feeding the glass foil through a laser printer, and for the following mask levels from patterns laser-printed on transfer paper. The transistors have off currents from ˜ 10-12 A to ˜ 10-11 A and on-off current ratios of ˜ 106. Thus we have demonstrated a technology for the patterning of TFT circuits by printing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 424: Symposium H – Flat Panel Display Materials II , 1996 , 71
Copyright
Copyright © Materials Research Society 1997

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References

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