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Application of a Position Sensitive Atom Probe to the Analysis of the Chemistry and Morphology of Multi-Quantum Well Interfaces

Published online by Cambridge University Press:  21 February 2011

Alfred Cerezo ,
J. Alex Liddle ,
Chris R.M. Grovenor ,
Andrew G. Norman  and
George D.W. Smith
Alfred Cerezo
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
J. Alex Liddle
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
Chris R.M. Grovenor
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
Andrew G. Norman
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
George D.W. Smith
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
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Abstract

A position sensitive detector has been added to the Oxford atom probe facility, allowing the microchemistry of field ion specimens to be analysed with excellent chemical specificity and a lateral and depth resolution of better than 0.5nm. This paper presents some recent results obtained with this equipment on the chemistry and morphology of interfaces in multi-quantum well samples, illustrating the power of the technique in obtaining very detailed information on microstructural features with dimensions less than 1nm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 139: Symposium R – High Resolution Microscopy of Materials , 1989 , 45
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

[1] Jiang, H.X. and Lin, J.Y., J.Appl. Phys. 61, 624 (1987).Google Scholar
[2] Liddle, J.A., Norman, A.G., Cerezo, A. and Grovenor, C.R.M., 35th International Field Emission Symposium, July 17–22, 1988, Oak Ridge, Tennessee, U.S.A., to be published in J. de Phys. Colloq., Paris.Google Scholar
[3] Cerezo, A., Grovenor, C.R.M. and Smith., G.D.W. Appl. Phys. Lett. 46, 567 (1985).CrossRefGoogle Scholar
[4] Kellog, G.L. and Tsong, T.T., J. Appl. Phys. 51, 1184 (1980).CrossRefGoogle Scholar
[5] Cerezo, A., Grovenor, C.R.M. and Smith., G.D.W. J. de Phys. 47, C2–309 (1986).Google Scholar
[6] Cerezo, A., Grovenor, C.R.M. and Smith., G.D.W. J. Microsc. 141, 155 (1986).CrossRefGoogle Scholar
[7] Cerezo, A., Godfrey, T.J. and Smith., G.D.W. Rev. Sci. Instrum. 59, 862 (1988).CrossRefGoogle Scholar
[8] Cerezo, A., Godfrey, T.J., Grovenor, C.R.M., Hetherington, M.G., Hoyle, R.M., Jakubovics, J.P., Liddle, J.A., Smith, G.D.W. and Worrall., G.M. J. Microsc. (1989) to be published.Google Scholar
[9] Petford-Long, A.K., Private communication.Google Scholar