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An Analysis of the Effect of System Variables on the Quality of Thin Films and Powders Produced by Laser-Breakdown Chemical Vapor Deposition

Published online by Cambridge University Press:  26 February 2011

E.L. Joyce Jr.  and
T.R. Jervis
E.L. Joyce Jr.
Affiliation:
Materials Science and Technology Division, Mail Stop E-549, P.O. Box 1663, Los Alamos National Laboratory, Los Alamos, NM 87545
T.R. Jervis
Affiliation:
Materials Science and Technology Division, Mail Stop E-549, P.O. Box 1663, Los Alamos National Laboratory, Los Alamos, NM 87545
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Abstract

A gas phase process for large area depositions on an ambient temperature substrate using laser-induced dielectric breakdown of gas phase precursors has recently been developed.1 Deposits of nickel alloys show excellent grain refinement (<10 nm) and metastable phase incorporation due to rapid quenching from the gas phase. Particle size distribution and compositional variance within the deposited films have been studied using electron microscopy and electron diffraction. Kinetic expressions to explain homogeneous gas phase nucleation and growth of the deposited materials have been developed in an effort to better understand this process. The effect of system variables on film and powder grain sizes has been studied. This analysis gives insight into the fluid flow/heat transfer patterns involved in the system and their effect on the final deposited material. The effect of system pressure, gas phase composition, and laser pulse energy, on particle size, surface area coverage, and deposition thickness are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 243
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

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