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Amorpiious Silicon Thin Film Transistor and its Applications to Large-Area Electironics

Published online by Cambridge University Press:  21 February 2011

H. C. Tuan
H. C. Tuan*
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
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Abstract

In this paper, the amorphous silicon thin film transistor (a-Si:HTFT) technology is reviewed. Its applications to both one- and two-dimensional large-area devices are described. The issues related to the fabrication of TFT arrays on large-area substrates are also discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 33: Symposium D – Comparison of Thin Film Transistor and SOI Technologies , 1984 , 247
Copyright
Copyright © Materials Research Society 1984

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References

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