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Amorphous Domains in GaN Layers Grown on 6H-SiC by MBE
Published online by Cambridge University Press: 10 February 2011
Abstract
Using N-rich growth conditions, amorphous domains were formed in the initial stage of a cyclotron assisted MBE of GaN grown over 6H-SiC (0001) without any buffer layer. These domains are facetted along {1010} prismatic planes. Their density is about 1010cm-2 and they are mainly located in a 50 nm layer close to the substrate surface.
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- Copyright © Materials Research Society 1998