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Acoustic Emission for The Diagnostic of Semiconductor Structures

Published online by Cambridge University Press:  15 February 2011

O. V. Lyashenko  and
V. M. Perga
O. V. Lyashenko
Affiliation:
Physical Faculty, National University of T. Shevchenko, 252022, Kiev, Ukraine
V. M. Perga
Affiliation:
Deceased
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Abstract

Acoustic emission (AE), electric current fluctuation, as well as luminescence intensity fluctuations in lightemitting semiconductor structures have been investigated. The authors examined the hypothesis about the origin of nonelectronic acoustic low frequency noise that is observed in electronic systems. The various sets of AE's sources allow one to understand the various dynamics of the AE in the structures on the A3B5 compound base and p-n germanium diodes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 406: Symposium L – Diagnostic Techniques for Semiconductor Materials Processing , 1995 , 449
Copyright
Copyright © Materials Research Society 1996

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