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β-Acetoxyethyl Silsesquioxanes: Chloride-Free Precursors for SiO2 Films Via Staged Hydrolysis

Published online by Cambridge University Press:  10 February 2011

Karin A. Ezbiansky ,
Barry Arkles ,
Russell J. Composto  and
Donald H. Berry
Karin A. Ezbiansky
Affiliation:
Department of Chemistry and Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104-6323
Barry Arkles
Affiliation:
Gelest, Inc. 612 William Leigh Drive, Tullytown, PA 19007-6308
Russell J. Composto
Affiliation:
Department of Chemistry and Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104-6323
Donald H. Berry
Affiliation:
Department of Chemistry and Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104-6323
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Abstract

Silsesquioxanes containing β-acetoxyethyl (BAE) groups are processible resins that can be employed as spin-on-glass precursors to dielectric silica films. Thermal treatment >250 °C results in extrusion of ethylene from the CH2CH2OCOCH3 moiety with formation of Si- OCOCH3 groups, which undergo facile hydrolysis to a silica network. A minor pathway involving extrusion of acetic acid leaves some silicon vinyl groups, leading to residual organic carbon in the material. However, addition of a fluoride ion catalyst greatly accelerates the major reaction, resulting in lower conversion temperatures (<200 °C), quantitative extrusion of ethylene, and essentially pure silica. Alternatively, BAESSQs can be processed photochemically (λ <200 nm) to cleanly yield silica at ambient temperature.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 606: Symposium NN – Chemical Processing of Dielectrics, Insulators & Electronic Ceramics , 1999 , 251
Copyright
Copyright © Materials Research Society 2000

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