Skip to main content Accessibility help
×
Home
Hostname: page-component-768dbb666b-bxbhv Total loading time: 0.235 Render date: 2023-02-04T10:19:37.566Z Has data issue: true Feature Flags: { "useRatesEcommerce": false } hasContentIssue true

Zeolite Low-k Film Properties Dependence on Nanocrystal Size

Published online by Cambridge University Press:  01 February 2011

Salvador Eslava-Fernandez
Affiliation:
eslava@imec.be, IMEC, ITTO, KAPELDREEF 75, LEUVEN, BELGIUM, B3001, Belgium, 003216288686
M.R. Baklanov
Affiliation:
baklanov@imec.be, IMEC, Kapeldreef 75, Leuven, B3001, Belgium
F. Iacopi
Affiliation:
iacopi@imec.be, IMEC, Kapeldreef 75, Leuven, B3001, Belgium
Brongersma S.H.
Affiliation:
Sywert.Brongersma@imec.be, IMEC, Kapeldreef 75, Leuven, N/A, B3001, Belgium
C.E.A. Kirschhock
Affiliation:
christine.kirschhock@biw.kuleuven.be, K.U.Leuven, COK, Leuven, N/A, B3001, Belgium
K. Maex
Affiliation:
Karen.Maex@imec.be, K.U.Leuven, ESAT, Leuven, N/A, B3001, Belgium
Get access

Abstract

Spin-on pure-silica-zeolite MFI films consist of zeolite nanocrystals embedded in a compacted silica matrix of zeolite primary nanoparticles. They appear to be promising as a low-k material due to their good mechanical properties and high microporosity, parallel to their intrinsic low k-value. Results are promising but the implementation of this material is still far away. To contribute to the implementation we present a study on the final film properties depending on the zeolite MFI nanocrystal size. Different techniques are used for the characterization: Dynamic Light Scattering, X-ray diffraction, Scanning Electron Microscopy, Nitrogen adsorption, EllipsoPorosimetry using toluene and NanoIndentation. The results show a clear dependence of the film properties on the nanocrystal size. Clearly, smaller nanocrystals provide better homogeneity, smaller pore size and higher mechanical properties. However, due to the hydrophilicity of the silica matrix lower k-values are only obtained for larger zeolite nanocrystals which provide with higher crystallinity in the films.

Type
Research Article
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 , Wang et al., Adv. Mater. 13 (2001), 1463.3.0.CO;2-H>CrossRefGoogle Scholar
2 , Tosheva et al., Chem. Mater. 17 (2005), 2494.CrossRefGoogle Scholar
3 http://www.iza-structure.org/databases/Google Scholar
4 , Wang et al., Langmuir 17 (2001), 25722574 CrossRefGoogle Scholar
5 , Baklanov et al., J. Vac. Sci. Technol. B 18(3) (2000), 1385.Google Scholar
6 , Li et al., Adv. Funct. Mater. 14 (2004), 1019.CrossRefGoogle Scholar
7 http://www.itrs.net/Common/2005ITRS/Interconnect2005.pdfGoogle Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Zeolite Low-k Film Properties Dependence on Nanocrystal Size
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Zeolite Low-k Film Properties Dependence on Nanocrystal Size
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Zeolite Low-k Film Properties Dependence on Nanocrystal Size
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *