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Ultra Fine Particle Films by Gas Deposition Method

Published online by Cambridge University Press:  25 February 2011

Masaaki Oda
Affiliation:
UFP Division, Vacuum Metallurgical Co., Ltd. 516 Yokota, Sanbu-cho, Sanbu-gun, Chiba-pref., Japan289-12
Isao Katsu
Affiliation:
UFP Division, Vacuum Metallurgical Co., Ltd. 516 Yokota, Sanbu-cho, Sanbu-gun, Chiba-pref., Japan289-12
Michitaka Tsuneizumi
Affiliation:
UFP Division, Vacuum Metallurgical Co., Ltd. 516 Yokota, Sanbu-cho, Sanbu-gun, Chiba-pref., Japan289-12
Eiji Fuchita
Affiliation:
UFP Division, Vacuum Metallurgical Co., Ltd. 516 Yokota, Sanbu-cho, Sanbu-gun, Chiba-pref., Japan289-12
Seiichiro Kashu
Affiliation:
UFP Division, Vacuum Metallurgical Co., Ltd. 516 Yokota, Sanbu-cho, Sanbu-gun, Chiba-pref., Japan289-12
Chikara Hayashi
Affiliation:
UFP Division, Vacuum Metallurgical Co., Ltd. 516 Yokota, Sanbu-cho, Sanbu-gun, Chiba-pref., Japan289-12
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Abstract

Ultra fine particles(UFP) of organic and inorganic materials can be formed by the gas evaporation method(gas condensation method). In the gas deposition method, particles formed by the gas evaporation method in an evaporation chamber are carried to another chamber (a deposition chamber) through a pipe. Particles are accelerated in the pipe with a gas flow and come out of a nozzle located in the deposition chamber which is being evacuated down to less than 10 torr and deposited on a substrate to form UFP films. The final speed of the particles depends on the pressure difference between the evaporation chamber and the deposition chamber. The particles speed exceeds 500m/s and adhesion strengths of the films reach 50OKgf/cm2 as well as vacuum deposition films in the condition that the pressure of the evaporation chamber is at 4 atms. Patterns of spots and lines with 50μm size and also wider films can be formed on a substrate without a masking system. The process is effective for repairing electric connecting lines or producing electrodes and condensers on an industrial scale.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

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References

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