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A Thin Film Solid State Nicrobattery for Use in Powering Nicrosensors

Published online by Cambridge University Press:  28 February 2011

Steven D. Jones
Affiliation:
Eveready Battery Company, Inc., Technology Laboratory, 25225 Detroit Road, Westlake,Ohio44145
James R. Akridge
Affiliation:
Eveready Battery Company, Inc., Technology Laboratory, 25225 Detroit Road, Westlake,Ohio44145
Susan G. Humphrey
Affiliation:
Eveready Battery Company, Inc., Technology Laboratory, 25225 Detroit Road, Westlake,Ohio44145
Chung-Chiun Liu
Affiliation:
Electronics Design Center, Case Western Reserve University, Cleveland, Ohio 44106
J. Sarradin
Affiliation:
Laboratoire de Physicochimie des Materlaux Solides. U.A. 407, Universite de Montpellier II, France
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Abstract

A thin film solid state microbattery has been used to power an O2 microsensor. The microbattery was fabricated using RF magnetron sputtering for the solid oxide/sulfide electrolyte and the TiS2 cathode. Vacuum evaporation was used for the deposition of LiI and Li anode. rhe microbattery is approximately 10 µm in thickness. The microbattery has an OCV of 2.4-2.5 V and shows close to 100% utilization to a 1.8 V cutoff when discharged between 10 and 135 µA/cm2. The microbattery is capable of supplying 2 second pulses of greater than 2 mA/cm2. The microbattery is rechargeable with over 200 cycles of 70% utilization to a 1.8 V cutoff at current densities up to 135 µA/cm2.

The O2 microsensor consists of a silk-screened Au working and Ag electrode. The Ag electrode was anodized to provide an Ag/AgCl counter electrode. The current produced at the sensor is proportional to the dissolved O2 concentration of an aqueous solution upon application of 0.6 V between the two electrodes.

Type
Research Article
Copyright
Copyright © Materials Research Society 1991

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