Skip to main content Accessibility help
×
Home
Hostname: page-component-5c569c448b-ph4cd Total loading time: 0.2 Render date: 2022-07-03T06:46:49.428Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "useNewApi": true } hasContentIssue true

Superlattice Optical Properties Measured by Variable Angle Spectroscopic Ellipsometry

Published online by Cambridge University Press:  26 February 2011

P. G. Snyder
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511;
K. G. Merkel
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511;
B. N. De
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511;
J. A. Woollam
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511;
D. W. Langer
Affiliation:
University of Pittsburgh, Pittsburgh, PA 15261;
C. E. Stutz
Affiliation:
Avionics Lab, WPAFB, Dayton, OH 45433;
R. Jones
Affiliation:
Avionics Lab, WPAFB, Dayton, OH 45433;
A. K. Rai
Affiliation:
Universal Energy Systems, Dayton, OH 45432.
K. Evans
Affiliation:
Universal Energy Systems, Dayton, OH 45432.
Get access

Abstract

Variable Angle of incidence Spectroscopic Ellipsometry (VASE) is a sensitive, nondestructive method of determining optical constants, layer thicknesses, alloy compositions and other parameters. We model the VASE data for a sample containing a 20 period Al0 5Ga0 5As-GaAs superlattice, to obtain the effective index of refraction (n) and e tinction coefficient (k) of the superlattice layer. The room temperature VASE spectra contain strong, sharp features at the e-hh(1), e-lh(1) and e-hh(2) excitonic tran-sition energies. In addition, VASE was used to characterize more compli-cated layered structures, which also contained superlattices.

Type
Research Article
Copyright
Copyright © Materials Research Society 1988

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Footnotes

*

Research supported by NASA Lewis Grant NAG-3-154.

References

[1]Efron, U., Hsu, T.Y., Schulman, J.N., Wu, W.Y., Rouse, I., D'Haenens, I.J. and Chang, Y-C, SPIE Vol.792, 197 (1987).Google Scholar
[2]Sonek, G.J., Ballantyne, J.M., Chen, Y.J., Carter, G.M., Brown, S.W., Koteles, E.S. and Salerno, J.P., IEEE J. Quantum Electronics 22, 1015 (1986).Google Scholar
[3]Snyder, P.G., Rost, M.C., Bu-Abbud, G.H., Woollam, J.A. and-Alterovitz, S.A., Journal of Applied Physics 60, 3293 (1986).Google Scholar
[4]Azzam, R.M.A. and Bashara, N.M., Ellipsometry and Polarized Light (North- Holland, Amsterdam, 1977).Google Scholar
[5]Bu-Abbud, G. H., Bashara, N.M., Woollam, J.A., Thin Solid Films 138, 27 (1986).Google Scholar
[6]Aspnes, D.E. and Studna, A.A., Applied Optics 14, 22 (1975).Google Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Superlattice Optical Properties Measured by Variable Angle Spectroscopic Ellipsometry
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Superlattice Optical Properties Measured by Variable Angle Spectroscopic Ellipsometry
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Superlattice Optical Properties Measured by Variable Angle Spectroscopic Ellipsometry
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *