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Study of crystalline structure N-doped GeSb Phase Change Material for PCRAM applications

Published online by Cambridge University Press:  01 February 2011

Audrey Bastard ,
Sandrine Lhostis ,
Caroline Bonafos ,
Sylvie Schamm-Chardon ,
Pierre-Eugène Coulon ,
Frederic Fillot ,
Giada Ghezzi ,
Andrea Fantini ,
Luca Perniola  and
Sebastien Loubriat
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Audrey Bastard
Affiliation:
audrey.bastard@cea.fr, CEMES, Toulouse, France
Sandrine Lhostis
Affiliation:
sandrine.lhostis@st.com, ST, Crolles, France
Caroline Bonafos
Affiliation:
bonafos@cemes.fr, CEMES, Toulouse, France
Sylvie Schamm-Chardon
Affiliation:
schamm@cmes.fr, CEMES, Toulouse, France
Pierre-Eugène Coulon
Affiliation:
pierre-eugene.coulon@polytechnique.edu, CEMES, Toulouse, France
Frederic Fillot
Affiliation:
frederic.fillot@cea.fr, CEA, Grenoble, France
Giada Ghezzi
Affiliation:
giada.ghezzi@cea.fr, CEA, Grenoble, France
Andrea Fantini
Affiliation:
andrea.fantini@cea.fr, CEA, Grenoble, France
Luca Perniola
Affiliation:
luca.perniola@cea.fr, CEA, Grenoble, France
Sebastien Loubriat
Affiliation:
sebastien.loubriat@cea.fr, CEA, Grenoble, France
Anne Roule
Affiliation:
anne.roule@cea.fr, CEA, Grenoble, France
Emmanuel Gourvest
Affiliation:
emmanuel.gourvest@cea.fr, CEA, Grenoble, France
Edrisse Arbaoui
Affiliation:
edrisse.arbaoui@cea.fr, CEA, Grenoble, France
Alain Fargeix
Affiliation:
alain.fargeix@cea.fr, CEA, Grenoble, France
Marilyn Armand
Affiliation:
marilyn.armand@cea.fr, CEA, Grenoble, France
Berangere Hyot
Affiliation:
berangere.hyot@cea.fr, CEA, Grenoble, France
Sylvain Maitrejean
Affiliation:
sylvain.maitrejean@cea.fr, CEA, Grenoble, France
Véronique Sousa
Affiliation:
veronique.sousa@cea.fr, CEA, Grenoble, France
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Abstract

100 nm-thick GeSbN films with high Sb content were investigated by XRD and TEM in order to investigate crystalline phases. We observe the crystallization of the two phases separatly. First, Sb rhomboedral crystallizes at 250°C and then cubic Ge appears at 340°C according to Reflectivity and X-Ray Diffraction measurements. With the incorporation of nitrogen in the thick films, a delay to crystallization of the two phases is observed. Grain size measurements with Scherrer formula support the decrease of grain crystallization with N content. Moreover, TEM observations show clearly the separation of the two phases in the layer and the reduction in size of the grains with nitrogen content. This allows a better re-amorphization than films without nitrogen.

Keywords

crystal growthcrystallinephysical vapor deposition (PVD)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1251: Symposium H – Phase-Change Materials for Memory and Reconfigurable Electronics Applications , 2010 , 1251-H03-22
Copyright
Copyright © Materials Research Society 2010

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