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Structure and Photoluminescence of Hydrogenated Amorphous Carbon Films Produced by Using Aromatic Hydrocarbon Source

Published online by Cambridge University Press:  10 February 2011

Jun Xu
Affiliation:
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China
Tianfu Ma
Affiliation:
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China
Wei Li
Affiliation:
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China
Li Wang
Affiliation:
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China
Zhifeng Li
Affiliation:
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Shanghai 200083, China
Kunji Chen
Affiliation:
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China
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Abstract

The organic carbon source –xylene(C6H6-C2H4), was used to fabricate a-C:H films in plasma enhanced chemical vapor deposition system. The structures and bonding configurations were characterized and compared with that of conventional methane-based samples by using Fourier Transform Infrared spectroscopy and Raman scattering technique. Strong room temperature luminescence in blue-green light range was found and the PL feature was quite different from that of methane-based a-C:H films.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

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References

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Structure and Photoluminescence of Hydrogenated Amorphous Carbon Films Produced by Using Aromatic Hydrocarbon Source
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