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Structure and Morphology of Vitreous Chalcogenide Thin Films Obtained by Plasma-Enhanced CVD
Published online by Cambridge University Press: 21 February 2011
Abstract
Thin films of chalcogenide glasses GeSeywere prepared by PECVD for lithographic applications. Their structure and morphology were characterized by EXAFS and electron microscopy. EXAFS studies enabled comparison of the structures of thin films and those of homologous bulk glasses. Morphology studies by SEM and TEM revealed an heterogeneous structure explained by a phase separation: these glasses consist of microdomains whose size varies with the overall GeSey composition.
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- Copyright © Materials Research Society 1990